But when excited by wide periodical-rectangle-wave pressure, the sample thin-film transducer gives a distorted response. 但在宽脉冲方波气压激励下,所用溅射薄膜压力传感器出现响应失真现象。
Development and performance Test of a Thin-Film Temperature TranSducer 一种薄膜温度传感器的研制与性能试验
High Integration Thin-film Pressure Transducer Design and Technology 高性能薄膜压力传感器设计与工艺
Dynamic characteristics of ion beam sputtered thin-film pressure transducer 离子束溅射薄膜压力传感器的动态特性